Fabrication and Optimization of Humidity Sensor Based on Titanium Dioxide Nanoparticles

Document Type : Original Article

Authors
Mahsa Mahdavinia 1
Vahid Niapak 2
Gholamreza Kiani 3
Ayub Karimzad Ghavidel 4
1 Department of Organic Chemistry and Biochemistry, Faculty of Chemistry, University of Tabriz, Tabriz, Iran.
2 Department of Nanotechnology Engineering, Faculty of Electrical and Computer Engineering, University of Tabriz, Tabriz, Iran
3 Department of Organic Chemistry and Biochemistry, Faculty of Chemistry, University of Tabriz, Tabriz, Iran
4 Department of Mechanical Engineering, Technical and Vocational University (TVU), Tehran, Iran
Abstract
The aim of this research is to fabricate a humidity sensor based on stable nanoparticles of anatase phase of titanium dioxide, for improving its characteristics such as sensitivity, response time and recovery. For this purpose, titanium dioxide nanoparticles were synthesized by hydrothermal method, then the structural characteristics of the prepared nanostructure were examined by a scanning electron microscope. The results showed that the synthetic titanium dioxide is in the form of spheres with the average dimension of 270 nm. To prepare the humidity sensor, the prepared nanoparticles were deposited on interdigitated electrode using the blade deposition method. The research’s findings indicated that the sensitivity of the prepared anatase phase sensor is 12.81 (Rair/RHumidity)/%RH in the relative humidity range of 40-98%, improved 14% compared to the previous ideal sample which was based on rutile phase and anatase. Also, the response and recovery times of this sensor were measured as 2 and 4.5 seconds, respectively, which were 14 and 7 times higher than the previous samples.
Keywords
Humidity sensor
Metal oxide nanoparticles
Anatase phase
Titanium oxide nanoparticles
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  • Receive Date 27 December 2022
  • Revise Date 31 January 2023
  • Accept Date 28 February 2023